Several major work safety factors to invest in the construction of panel factory

[China Glass Network] The panel is one of the most important industries in Taiwan. The number and size of equipment required for the panel are not inferior to the semiconductor production line. However, Taiwan's panel technology is in a leading position in the world. There are no foreign cases for reference. Safety regulations must be customized to reduce accidents.

Taiwan panel factory introduced the safety specification very early. As early as the 3.5-generation panel, there have been related practices. Since the equipment used in the panel industry is similar to the semiconductor industry, the safety specification SEMIS2 of semiconductor manufacturing equipment is still applied in the plant planning. Derivative application; but as far as the specifications of the equipment are concerned, it can be found that there are still important differences between the panel industry and the semiconductor industry. At that time, the 3.5-generation glass substrate has exceeded the wafer size of 12 inches, which is required for the semiconductor industry. Plants and equipment are completely different in scale, and the level of safety hazards and risks may vary.

In the panel equipment design phase, all equipment on the production line must be required to be equipped with emergency shutdown and emergency stop safety components.

Designing specific work safety specifications in accordance with the nature of the panel process

Although most of the specifications are applicable to the needs of panel manufacturing equipment, the application of semiconductor equipment specifications directly to larger-sized panel equipment does appear to be somewhat out of place. For example, the Chamberlid lifting equipment of the semiconductor industry is used in the panel industry. There may be problems such as insufficient bearing strength, and the panel industry thus corrects the use of fixed lifting equipment as a lifting device, and the risk of personnel operating the load may still occur during the operation.

In addition, the SEMIS2 specification cited by the semiconductor industry focuses on the single device security specification, but the panel industry machine is a combination of several large auxiliary devices. Interface integration is more important, so the integration security problem must be more inked, but in SEMIS2 has been paid for.

The industry pointed out that although the panel is similar to the semiconductor industry, but different industries, LCD manufacturers and semiconductors are pursuing the maximization of equipment scale and efficiency, but the two sides are different in nature, which will inevitably produce more different security requirements. The equipment manufacturer only follows the SMEIS2 standard. The risk of the panel factory and the factory building will not be easily controlled. When the equipment manufacturer designs the equipment, the safety requirements of the panel factory cannot be understood. Therefore, at the beginning of the production line planning, the characteristics of the panel manufacturing are also Develop safety protection specifications.

Therefore, when the panel factory from the 4th generation to the 5th generation began to plan construction, Taiwan panel makers began to develop safety specifications suitable for the panel industry, adjusted from the SEMIS2 benchmark, and introduced this specification at the same time in the planning of the plant and production line.

Because Taiwan's panel technology is in a leading position in the world, there is no relevant foreign case reference, and a little adjustment of the plant design, the production line has to change the traditional clean room design because of the need to accelerate the transmission speed; the new design is introduced. At present, the gap between the TFT-LCD process and the traditional semiconductor industry is widened, and some manufacturing security requirements are easily ignored. Therefore, the development of a complete 5th generation panel factory safety specification has become the primary consideration at that time.

Complete work safety design logic

Due to the large number of specifications in the production field, the simplification and consistency of the security message connection and integration is very important; together with the changes of different generations of factories, how to integrate into a production field without a gray area, which can be fully grasped. The needs of the professional team have become an indispensable item in the development of safety regulations at this time.

There are no obvious differences in the logic of the safety regulations applied to the panel industry or the semiconductor industry. The main problems occur mostly in the subtle aspects of operation. These problems are mostly “special hazards” on the panel production line, especially the production lines of large panels. The safety requirements of carrying, electricity and power are somewhat different from those of the traditional semiconductor industry, such as the operation requirements of the robot arm, which is less ink in the SEMIS2.

In addition, it is different from the semiconductor industry in terms of the “work exclusion” program. Because semiconductor equipment is small in scale, if the personnel handles only a part of the hand or the body enters, but the organization is large to a certain extent, the human body The important part is likely to enter the entire device, and the risk factor is relatively large.

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